Resolution |
Stroke |
PackageSize |
No of actuator |
Feadback |
Ordercode |
5nm
|
80x80μm |
120x120x25 mm |
2
|
No |
NXY080 |
Yes |
NXY-080SG |
150x150μm |
150x150x25 mm |
No |
NXY150 |
Yes |
NXY-150SG |
Applications:
• Optical fiber and Mask alignment
• Confocal Imaging
• Nano lithography
• Scanning Probe